Chemical Vapor Deposition Coating for Micromachines
نویسندگان
چکیده
منابع مشابه
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Gas-phase silver nanoparticles were coated with silicon dioxide (SiO2) by photoinduced chemical vapor deposition (photo-CVD). Silver nanoparticles, produced by inert gas condensation, and a SiO2 precursor, tetraethylorthosilicate (TEOS), were exposed to vacuum ultraviolet (VUV) radiation at atmospheric pressure and varying temperatures. The VUV photons dissociate the TEOS precursor, initiating ...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2000
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-616-21